Microsystems and semiconductor fabrication

Get ready to dive into the fascinating world of semiconductor devices, microsensors, microactuators, and the microtechnologies that power them. In this unit, you’ll explore the core principles and materials behind MEMS and semiconductor devices, and learn how to characterise them electrically and mechanically. You’ll investigate essential MEMS structures like cantilever beams and comb drives, as well as patterns for diodes and transistors. You'll also get hands-on with key microfabrication techniques, such as photolithography, etching, deposition, and more. Through lab work, project-based learning, simulations, and device construction, you'll build practical skills that connect directly to real-world applications.

Problem-based learning - To deepen your understanding of the concepts and principles, you will be given problem-solving tasks to complete individually or in small groups.

Simulation or virtual practice - This unit allows students to engage in guided, immersive experiences to develop relevant skills, knowledge and attitudes through simulation or virtual practice

Research activities - This unit allows students to develop their research skills by engaging in structured inquiry in preparing research proposals using a systematic approach and discipline-specific methodologies.

Active learning - This unit includes interactive workshops and computer laboratories for you to enhance your knowledge learned in lectures through individual or group participation in activities.

The minimum total expected workload to achieve the learning outcomes for this unit is 144 hours per semester typically comprising a mixture of 3-6 hours of scheduled learning activities and 6-9 hours of independent study per week. Scheduled activities may include a combination of teacher-directed learning, peer-directed learning and online engagement. Independent study may include associated readings, assessment and preparation for scheduled activities.